JPH0287067U - - Google Patents
Info
- Publication number
- JPH0287067U JPH0287067U JP16492088U JP16492088U JPH0287067U JP H0287067 U JPH0287067 U JP H0287067U JP 16492088 U JP16492088 U JP 16492088U JP 16492088 U JP16492088 U JP 16492088U JP H0287067 U JPH0287067 U JP H0287067U
- Authority
- JP
- Japan
- Prior art keywords
- film forming
- substrate
- heater
- heating
- source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims 3
- 239000000463 material Substances 0.000 claims 2
- 238000004544 sputter deposition Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
Landscapes
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16492088U JPH0287067U (en]) | 1988-12-19 | 1988-12-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16492088U JPH0287067U (en]) | 1988-12-19 | 1988-12-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0287067U true JPH0287067U (en]) | 1990-07-10 |
Family
ID=31450943
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16492088U Pending JPH0287067U (en]) | 1988-12-19 | 1988-12-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0287067U (en]) |
-
1988
- 1988-12-19 JP JP16492088U patent/JPH0287067U/ja active Pending
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